In high-precision industries like chip fabrication and vacuum coating, maintaining stable vacuum conditions is essential for consistent product quality. As a key working fluid, vacuum diffusion pump oil determines the reliability and efficiency of vacuum systems.

Our high-purity phenyl silicone-based diffusion pump oil features low vapor pressure, excellent thermal stability, and oxidation resistance. It is widely used in processes such as plasma etching, ion implantation, and sputtering, effectively improving pump performance and uptime.

With shrinking semiconductor process nodes, high-quality diffusion pump oil is becoming an invisible yet critical component in wafer fabrication success.