As semiconductor production advances into the 7nm era and beyond, vacuum system cleanliness and reliability have become mission-critical. Vacuum diffusion pump oil, the core working medium in diffusion pumps, directly impacts yield rates and process consistency.

Using high-purity phenylsiloxane structures, modern pump oils deliver ultra-low vapor pressure (down to 10⁻⁸ Torr), excellent thermal stability, and chemical inertness. This prevents wafer contamination and reduces backstreaming during PVD, CVD, and e-beam welding processes.

Today's leading oils undergo multi-stage distillation to remove metal ions and volatiles, improving uptime and minimizing maintenance. As vacuum technology evolves, diffusion pump oil continues to serve as a clean and dependable support fluid for next-generation semiconductor fabrication.