In cutting-edge fields like semiconductor fabrication, aerospace engineering, and high-energy physics, achieving ultra-high vacuum conditions is critical to operational success and product quality. As the essential working fluid of diffusion pumps, vacuum diffusion pump oil plays a vital role by offering outstanding thermal stability, ultra-low vapor pressure, and extended service life.

This specialized silicone oil—typically based on phenyl or alkyl siloxane structures—is engineered for high-purity, high-temperature operation. At temperatures ranging from 150°C to 250°C, it vaporizes rapidly and creates high-velocity molecular jets within the pump chamber, enabling effective evacuation of low-pressure gases. With vapor pressures as low as 10⁻⁸ Torr, it is widely used in semiconductor packaging, vacuum deposition, electron beam welding, and particle accelerators.

Today’s advanced vacuum systems demand higher cleanliness, stability, and reduced backstreaming. Modern diffusion pump oils are refined to minimize metal impurities and optimize molecular weight, reducing thermal decomposition residues and contamination near the pump inlet. For applications like integrated circuit fabrication, multi-stage molecularly distilled ultra-pure oils have been developed to meet vacuum requirements below 10⁻⁹ Torr.

In response to green manufacturing and occupational safety standards, eco-friendly versions of vacuum pump oils with low toxicity and volatility are also being introduced. These new formulations provide better air quality and operational safety in cleanroom environments.

As next-generation industries place increasing demands on vacuum precision and durability, vacuum diffusion pump oils will continue to evolve—delivering cleaner, more efficient, and more reliable performance across high-vacuum systems worldwide.