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Vacuum quality plays a decisive role in semiconductor and display manufacturing. IOTA vacuum diffusion pump oil offers ultra-low vapor pressure, exceptional thermal stability, and fast pumping speeds to support cleaner, more efficient vacuum systems.
Formulated with high-purity phenylsiloxanes, the oil resists volatilization and thermal breakdown even above 250°C, minimizing backstreaming and contamination. It performs reliably in critical processes like plasma etching and vacuum deposition.
Widely used in OLED lines, etching tools, and research platforms, IOTA pump oil helps achieve long-term vacuum stability and reduced maintenance cycles, making it ideal for high-purity manufacturing environments.